| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem wherein focusing value changes over time during carrying out actual lot processing, even though the best focusing value is obtained in advance by carrying out test exposure in the conventional methods. SOLUTION: The calculation method for the best focusing value to form a desired pattern size has a step of calculating the change between the focus to form the pattern and the best focus by making an exposure, using the size difference of the first and second patterns obtained from a first pattern that does not change the size, even if the focus is changed and a second pattern that changes the size, when the focus is changed, both of them are the patterns formed in the past exposures, and a step of determining if the focus changes in the positive or negative focusing direction by using a third pattern which shows changes from the best focus. COPYRIGHT: (C)2004,JPO |
