| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric resonator which can extremely reduce effect of spurious vibration, and at the same time does not reduce Q. SOLUTION: The piezoelectric resonator 1 has a substrate 2 and a vibration part 7 in whose structure at least a pair of an upper electrode 6 and a lower electrode 5 are facing and holding on the upper and lower planes of a thin film part 4 that is formed on the substrate 2 and has one or more layers of piezoelectric thin films. Shape of a part where the upper electrode 6 and the lower electrode 5 overlap each other in the thickness direction, is a rectangle seen from the thick direction, and the length of the long side of the rectangle is more than 20 times the resonant wavelength of the main vibration and the length of the short side is less than 5 times the resonant wavelength. COPYRIGHT: (C)2004,JPO
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