发明名称 SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND INSERTION METHOD OF DUMMY METAL
摘要 PROBLEM TO BE SOLVED: To provide a means capable of easily inserting dummy metals as many as possible and preventing the deterioration of the performance of a already existing wiring metal signal due to the insertion of the dummy metals. SOLUTION: In a semiconductor integrated circuit, the dummy metal 1 is not arranged at a position whereat a distance between the dummy metal 1 and a wiring metal 4 becomes shorter than a preset limited distance in arrangement. The limited distance in arrangement is preferably changed by the width of the dummy metal 1 and the neighboring wiring metal 4. According to this method, the dummy metals 1 can be easily inserted into a wiring metal layout as many as possible, and the deterioration of the performance of the already existing wiring metal signal due to the insertion of the dummy metals 1 can effectively be prevented. COPYRIGHT: (C)2004,JPO
申请公布号 JP2003282569(A) 申请公布日期 2003.10.03
申请号 JP20020078557 申请日期 2002.03.20
申请人 RICOH CO LTD 发明人 YOSHIOKA KEIICHI
分类号 H01L23/52;H01L21/3205;H01L21/82;(IPC1-7):H01L21/320 主分类号 H01L23/52
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