| 摘要 |
PROBLEM TO BE SOLVED: To collect and remove particle-like foreign matters contained in a gas medium circulating in a laser oscillator. SOLUTION: A discharge section is positioned in an optical resonator, and at the same time, is integrated into a circulation path including a heat exchanger and a blower. A medium gas is caused to flow at a high speed through the circulation path. A duct whirling and collecting mechanism is provided on the downstream side of the heat exchanger on the discharge side of the blower, and the medium gas blown out from the blower is supplied to the discharge section through the dust whirling and collecting mechanism. The medium gas containing the particle-like foreign matters such as dust which is introduced through a medium gas entrance line 11 moves from up to down, while whirling, in a whirling section line 12. At that time, foreign matters which have a specific gravity larger than that of the medium gas are centrifugal separated, to fall down through a slit 15 into a dust collecting section 17 and accumulate there. A shaft for whirling the gas might be set up in a horizontal direction. The foreign matters could be separated, with the gas pressure varied according to a diameter of the foreign matters. COPYRIGHT: (C)2004,JPO
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