| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a discharge plasma processing method forming a high- quality thin film on the surface of a workpiece at a high speed without exposing the whole body of the workpiece to a high temperature. <P>SOLUTION: This plasma processing method impresses an electric field between a pair of opposed electrodes, whose one electrode opposite surface, at least, is covered with a solid dielectric, and jets a glow discharge plasma generated by introducing processing gas between the opposed electrodes, to the workpiece body disposed outside the plasma generation space. This discharge plasma processing method is characterized in locally heating the plasma jetting part and its surroundings of the workpiece body. <P>COPYRIGHT: (C)2004,JPO |
