| 摘要 |
PROBLEM TO BE SOLVED: To solve a problem that when a board is held using an adhesive sheet, an air layer is formed between the board and the sheet and since the air layer expands when the ambient pressure is reduced under that state, adhesion lowers to possibly cause falling of the board and that the pasted adhesive sheet must be stripped by hand. SOLUTION: An adhesion holding mechanism produced by applying an adhesive sheet 42b to an iron plate 41b is secured at least to a press plate 7. Furthermore, a plurality of suction chucking holes 7d are made to extend from the press plate 7 to the surface of the adhesion holding mechanism. An upper board 1b is then suction chucked while holding adhesion and pressure bonded to a lower board 1a. Thereafter, the adhesive sheet 42b is stripped from the surface of the upper board 1b using a stripping mechanism comprising a push shaft 48b. COPYRIGHT: (C)2004,JPO
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