发明名称 GLASS BOARD SUPPORTING JIG
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a glass board holder that can prevent warpage of a glass board by a pressing pin and keep the glass board in a high flatness. <P>SOLUTION: The glass board holder is provided with a holding frame (1) for holding the glass board (8) wherein an opening (1a) for transparent illumination slightly smaller than the glass board (8) is formed, a reference positioning member (2) that is provided on two sides adjacent to the holding frame (1) to determine a reference position of the glass board (8), a suction member (6a) that is arranged in a periphery of an opening of the holding frame (1) and sucks/holds four sides of the glass board (8), a pressing means (3) that presses the glass board (8) onto the positioning member (2) for positioning, and a force generation mechanism (7) that gives a tension force to the glass board (8) by the suction member (6a) at least in an opposite direction to the pressing direction of the pressing means (3) in a state where the glass board (8) is pressed down to the positioning member (2). <P>COPYRIGHT: (C)2004,JPO</p>
申请公布号 JP2003282684(A) 申请公布日期 2003.10.03
申请号 JP20020080832 申请日期 2002.03.22
申请人 OLYMPUS OPTICAL CO LTD 发明人 OKADA HISAFUMI
分类号 G01N21/958;H01L21/68;H01L21/683;(IPC1-7):H01L21/68 主分类号 G01N21/958
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