| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To prevent adhesion of a residue or generation of particles due to a remaining liquid by promoting falling of a droplet. <P>SOLUTION: A board holding device 1 is provided with contact supporting parts 25 and 27 and a falling prevention part 29 in its holding part that are brought into contact with a periphery of a board W and keep the board W erected, and it is also provided with droplet guides 25c, 27c and 29c for promoting the falling of a droplet in the contact supporting parts 25 and 27 and the falling prevention part 29. The droplet guides 25c, 27c and 29c promote the falling of the droplets adhering on the front and rear surfaces or in the periphery of the board W, so that no droplet is left in the contact supporting parts 25 and 27 and around the falling prevention part 29. Therefore, the adhesion of the residue or the generation of the particles due to the remaining liquid can be prevented. <P>COPYRIGHT: (C)2004,JPO</p> |
