THIN FILM, MANUFACTURING METHOD OF THIN FILM, THIN FILM MANUFACTURING DEVICE, ORGANIC EL DEVICE, MANUFACTURING METHOD AND MANUFACTURING DEVICE THEREOF, AND ELECTRONIC APPARATUS

摘要

PROBLEM TO BE SOLVED: To prevent vapor of a solvent from being brought to a succeeding process after a thin film layer is made from a solution containing a film formation constituent and the solvent.

SOLUTION: The thin film is made from the solution containing the thin film formation constituent and the solvent, and the atmosphere in the vicinity of the thin film is set to 1 Pa or below at ordinary temperature to remove solvent molecules from the thin film until making a condition where no solvent molecule is substantially present in the atmosphere.

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