THIN-FILM LAMINATED BODY, THIN-FILM CELL, CAPACITOR, AND METHOD AND EQUIPMENT FOR MANUFACTURING THIN-FILM LAMINATED BODY

摘要

A thin-film laminated body formed by laminating a unit of laminated layer comprising at least a first thin-film layer and a second thin-film layer repeatedly two or more times, wherein the laminated layer area of at least either of the first and second thin-film layers is gradually decreased from the lower layer to the upper layer, whereby the reliability of connection between the layers can be increased and a formability and an adhesive strength when protective layers are formed on side surfaces can be increased.