| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To realize a method of precisely setting rotation center of a stage. <P>SOLUTION: In a state that the stage is not turned, a charged particle image is fetched. Then, the stage is turned byθ(<360°), and the charged particle image after its rotation is fetched. Then, by a data processing function of a computer, data on the charged particle image in which data on the fetched charged particle image is turned by (-θ) around the image center (x<SB>1</SB>, y<SB>1</SB>) is obtained. Then, a deviation (Δx,Δy) of the image is calculated on the basis of the data on the charged particle image before its rotation and the data on the charged particle image after its rotation by (-θ). Then, the image center (x<SB>1</SB>, y<SB>1</SB>), a rotation angleθand the deviation (Δx,Δy) of the image are given to a specific computing expression, and rotation center coordinates (x<SB>0</SB>, y<SB>0</SB>) of the stage are found. Then, the found rotation center coordinates (x<SB>0</SB>, y<SB>0</SB>) of the stage are used as rotation center coordinates of the computer. <P>COPYRIGHT: (C)2004,JPO</p> |
