| 摘要 |
<p>PURPOSE:To omit a photoswitch or the like for finding an origin. CONSTITUTION:A holding board 6 moves a moving region within a X-Y plane in the direction of a Y-axis by a Y-driving cylinder 3 and in the direction of a Y-axis by a X-driving cylinder 3. A position of the holding board 6 is detected by a Y-interferometer 9 and a X-interferometer 10 photoreceiving reflected light of a Y-mirror 7 and a X-mirror 8 integrated with this board. The Y-mirror 7 and the X-mirror 8 are provided with the reflection-preventive films 7a, 8a on the respective ends for setting up an output of the Y-interferometer 9 to a prescribed reference value by the reflection-preventive film 8a of the X-mirror when an error signal is generated on the X-interferometer. The origin finding of the X-interferometer 10 is also similarly performed by an error signal of a second Y-interferometer 11.</p> |
