发明名称 Method and apparatus for thin film center shielding
摘要 A carrier (20) is used in the thin film coating of disks (35). The disks (35) are held in a disk tray (30). The disks (35) have a center (35a) through which the thin film coating can go through. The carrier (20) includes a base plate (21) for receiving the disk tray (30). A plurality of discrete shields (24) are positioned in alignment with the center openings of the disk (35). The shields (24) are releasably connected to the base plate (21). Preferably, the shields (24) are releasably connected by a magnetic force.
申请公布号 US2003185978(A1) 申请公布日期 2003.10.02
申请号 US20020112986 申请日期 2002.03.29
申请人 ROBERTS GREGORY D.;WILLSON RICHARD F. 发明人 ROBERTS GREGORY D.;WILLSON RICHARD F.
分类号 C23C14/50;(IPC1-7):C23C16/00 主分类号 C23C14/50
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