Microscope apparatus

摘要

A microscope apparatus which is capable of quickly taking a clear image of a sample. A support base supports the sample and a microscope magnifies the sample. A line sensor acquires a line image of the magnified sample and an image processing device produces an image of the sample based on the line image acquired by the line sensor. The support base has an adjusting mechanism for adjusting a tilt thereof and a focal length of the microscope. Focusing is achieved by, means of a light-projecting device for projecting light onto the sample and a light-receiving device for receiving light reflected by the sample and determining a focal length based on deformation of the received light. The light is projected onto the sample at a position in the vicinity of a range on the sample to be imaged by the line sensor. A two-dimensional CCD sensor is used to obtain a two-dimensional image of the sample for setting an imaging region.