FITTING FOR PIPE, PIPING SET AND WIRING FOR PIPE CONDUCTION

摘要

PROBLEM TO BE SOLVED: To eliminate the necessity of grounding conductive pipes individually in the case where each of the conductive pipes is required to be kept at an earth electric potential in piping structure to which a plurality of the conductive pipes are connected.

SOLUTION: The pipes for supplying polymer removal liquid to a nozzle 22 from a polymer removal liquid supply source comprise multiple conductive tubes 3 connected to each other through fittings 1 for piping. The conductive tubes 3 are made of chemical liquid proof resin and formed with straight line- like stripe conductive layers made of carbon material from one end to the other end of the tubes on their surface to give conductivity to them. The fittings 1 for piping are made of PFA resin in which carbon is mixed as conductive material to be conductive, which makes it possible to be conductive electrically by connecting two conductive tubes 3 to each other in series.

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