| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an X-ray image magnifying device capable of changing an imaging magnification by using an oblique incidence mirror having no wavelength selectivity. <P>SOLUTION: This X-ray image magnifying device is characterized by being provided with an illumination optical system 3 for irradiating the X-ray emitted from an X-ray source to a sample 4, an objective lens 5 configurated by an oblique incidence mirror composed of a rotary hyperboloidal face and a rotary ellipsoidal face for magnifying and focusing the X-ray penetrating through the sample 4 onto a predetermined position, an X-ray image detecting means 6 for detecting the focused X-ray image, and a focusing magnification adjusting means for adjusting the focusing magnification of the X-ray image by axially moving at least one of the X-ray image detecting means 6, the sample 4 and the illumination optical system 3. Thereby, in the device using the oblique incidence mirror as the objective lens, the imaging magnification can be changed without exchanging the oblique incidence mirror in the X-ray image magnifying device. <P>COPYRIGHT: (C)2004,JPO</p> |
