| 摘要 |
PROBLEM TO BE SOLVED: To efficiently replenish rinsing liquid by a cascade system. SOLUTION: A rinsing tank 62 on the most downstream side is replenished with the rinsing liquid through a replenishing nozzle 196. The tank 62 is provided with an overflow part 224 on an opposite side to the nozzle 196, and the rinsing liquid overflowing from the tank 62 flows into a rinsing tank 60 from the bottom part of the tank 60. A rinsing tank 58 on the upstream side of the tank 60 is provided with an overflow tube 58A and also an overflow part 234, then the rinsing liquid overflowing from the tank 60 to the overflow part 234 flows out from the overflow part 234 to the bottom part of the tank 58. COPYRIGHT: (C)2004,JPO
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