| 摘要 |
PROBLEM TO BE SOLVED: To provide a valve for chemical solution capable of preventing chemical drip and efficiently shortening the flow passage. SOLUTION: A piston rod 5 inserted between a cylinder 2 and a cover 3 is reciprocated in the vertical direction by compressed air fed from an operation port 8. A circumferential edge part 15a of a diaphragm body 15 is held by the cylinder 2 and a body 9, and a valve element part 15c of the diaphragm valve element 15 is screwed to the piston rod 5. The valve element part 15c of the diaphragm valve element 15 is fixed to one end of a connecting rod 11 disposed concentrically with the piston rod 5, and a valve element part 16c of a diaphragm valve element 16 for suck-back with a circumferential edge part 16a thereof held by the body 9 and a diaphragm holding member 19 is fixed to the other end to allow the diaphragm valve element 16 for suck-back to be synchronously operated with the diaphragm valve element 15. COPYRIGHT: (C)2004,JPO
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