发明名称 MACHINING OF LITHIUM NIOBATE BY LASER ABLATION
摘要 <p>Machining of crystalline lithium niobate substrate (46) is carried out utilizing a laser (36) having a beam (37) with a wavelength near the absorption edge of lithium niobate substrate (46). The laser beam (37) is provided in pulses of short duration and at a repetition rate selected to ablate the surface of the lithium niobate substrate (46) without damaging the bulk material. Translation of the laser beam (37) and the substrate (46) with respect to each other can be carried out to define a trench of a desired geometry in the lithium niobate.</p>
申请公布号 WO2003081310(P1) 申请公布日期 2003.10.02
申请号 US2003005411 申请日期 2003.02.21
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