| 摘要 |
PROBLEM TO BE SOLVED: To provide a turbo molecular pump capable of exhibiting an effective solid adhesion preventing effect only by alteration of a material from a conventional one and arrangement of a small number of wires without requiring any additional special part. SOLUTION: In this turbo molecular pump, inside a casing 1 having a gas intake port 1c and an exhaust port 1d, an axial flow step part PA constructed of a rotor blade 13 and a stator blade 3 and a screw groove step part PV constructed of a thread groove rotor part 14 and a seal ring 15 facing it are arranged in this order from the intake port 1c side to the exhaust port 1d side. The seal ring 15 is formed of conductive ceramics having a predetermined resistance, and a power source 20 supplying electric current to the seal ring 15 for generating Joule heat directly is connected to an electrode arranged in the seal ring 15. COPYRIGHT: (C)2004,JPO
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