| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrode member capable of preventing any mixture of a film deposited on an electrode surface in a thin film under film deposition as an exfoliation film, or any defective film deposition attributable to minor abnormal discharge generated from the exfoliation film. SOLUTION: A diamond-like carbon protective film of homogeneous film quality is deposited on a magnetic base material 7 having a ferromagnetic thin film fed from a feeding roller 9 by optimizing the area ratio of the electrode member 18 to an aperture 19, and a magnetic medium capable of suppressing the drop-out number and improving the durability is manufactured. COPYRIGHT: (C)2004,JPO
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