SYSTEMS AND METHODS INCORPORATING AN END EFFECTOR WITH A ROTATABLE AND/OR PIVOTABLE BODY AND/OR AN OPTICAL SENSOR HAVING A LIGHT PATH THAT EXTENDS ALONG A LENGTH OF THE END EFFECTOR

摘要

Robot system incorporates a versatile end effector that can be used to transport wafers, map wafers, and autocalibrate the movements of the robotic system. Typically, the end effector of the invention is rotatably and/or pivotably coupled to a robotic arm and includes an optical sensor system whose light path preferably includes a directional component that extends along a lengthwise axis of the end effector. Preferably the end effector is independently movable about at least two axes. These characteristics, singly or in combination, allow the end effector to carry out transport, mapping, and autocalibration functions within a relatively small volume either horizontally, vertically, or at other desired orientations.