3-DIMENSIONAL ION SCATTERING SPECTROSCOPIC METHOD AND SPECTROSCOPIC DEVICE

摘要

A pulse ion beam (4) is applied from a pulse ion beam source (1) to a sample (3) contained in a vacuum chamber (2), so that scattering particles scattering from the sample (3) are detected by a 3-dimensional detection device. The 3-dimensional detection device includes a 3-dimensional detector (5), a pre-stage electric circuit (6), and a computer (7), and is configured so as to simultaneously obtain information on the energy of the scattering particles (information on the flying time) and the total 3-dimensional information on the total of 2-dimensional position information on the scattering particles. This enables analysis of a detailed structure in a short time as compared to the conventional method and suppresses damage to the sample by the beam application.