| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method for a substrate with a recessed part for a microlens coping with an aspherical lens. <P>SOLUTION: The substrate with the recessed part for the microlens is manufactured through a process of forming a first mask layer 6 on the surface of a glass substrate 5, a process of forming a first opening 61 on the first mask layer 6, a process of forming a first recessed part 31 on the glass substrate 5 by wet etching, a process of removing the first mask layer 6, a process of forming a second mask layer 63 on the surface of the glass substrate 5, a process of forming a third opening 631 on the second mask layer 63, a process of forming the recessed part on the glass substrate 5 by wet etching, and a process of removing the second mask layer 63. <P>COPYRIGHT: (C)2004,JPO |
