发明名称 |
CRYSTAL-GROWTH SUBSTRATE AND A ZNO-CONTAINING COMPOUND SEMICONDUCTOR DEVICE |
摘要 |
In a method of growing a ZnO-containing compound semiconductor single crystal, on a compound single crystal layer of a hexagonal crystal structure having a plurality of (0001) surfaces aligned in a sequence of terraces along a direction of a-axis, a ZnO-containing compound single crystal of a hexagonal crystal structure is grown, having an inclination from the c-axis toward the direction of the a-axis.
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申请公布号 |
US2003186088(A1) |
申请公布日期 |
2003.10.02 |
申请号 |
US20020260779 |
申请日期 |
2002.09.27 |
申请人 |
STANLEY ELECTRIC CO., LTD. |
发明人 |
KATO HIROYUKI;SANO MICHIHIRO |
分类号 |
C30B23/08;C30B23/02;C30B25/18;C30B29/16;H01L21/205;H01L21/36;H01L21/365;H01L33/12;H01L33/16;H01L33/28;H01L33/32;(IPC1-7):B32B9/00 |
主分类号 |
C30B23/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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