| 发明名称 |
Proximity lookup for large arrays |
| 摘要 |
Proximity effects of close neighbors to a cell that is to be printed are compensated for before printing. A lookup table containing a set of all known proximity mappings of neighbors to the cell to be printed is used to match a placement configuration, and a known correction is applied before printing the cell.
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| 申请公布号 |
US2003185062(A1) |
申请公布日期 |
2003.10.02 |
| 申请号 |
US20020109068 |
申请日期 |
2002.03.28 |
| 申请人 |
MICRON TECHNOLOGY, INC. |
发明人 |
WALD PHILLIP G.;KURTH CASEY;DERNER SCOTT |
| 分类号 |
H01L21/8242;H01L27/108;(IPC1-7):G11C7/00 |
主分类号 |
H01L21/8242 |
| 代理机构 |
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