发明名称 Apparatus and method for improving electrical conduction structure of a vertical cavity surface emitting laser
摘要 A heavily doped semiconductor layer is formed over the barrel of a vertical cavity surface emitting laser (VCSEL), providing current conduction and current spreading across and into the aperture of a laser barrel, while eliminating the need for a light-obstructing conductive electrical contact overhang. The VCSEL comprises a substrate, a first distributed Bragg reflector (DBR), an active region, a second DBR having a non-conductive ion implantation region and a laser barrel region with a first diameter, the heavily doped semiconductor layer, and a conductive electrical contact. The conductive electrical contact defines an opening with a second diameter that is greater than the first diameter.
申请公布号 US2003185268(A1) 申请公布日期 2003.10.02
申请号 US20020113487 申请日期 2002.04.01
申请人 ZHANG XIAOBO 发明人 ZHANG XIAOBO
分类号 H01S5/042;H01S5/183;(IPC1-7):H01S3/08 主分类号 H01S5/042
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