发明名称 A METHOD AND APPARATUS FOR PROCESSING NANOSCOPIC STRUCTURES
摘要 <p>The present invention relates to a method and apparatus for growing nanostructures in a controlled way, wherein the controlling comprises controlling the electron emitting tips used for the nanoscopic structure growth. Further, the present invention describes an integrated method and apparatus for growing a plurality of electron emitting tips and nanoscopic structures in the same growing process.</p>
申请公布号 WO2003080502(P1) 申请公布日期 2003.10.02
申请号 IS2003000015 申请日期 2003.03.25
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