发明名称 SELF-ALIGNED NANOTUBE FIELD EFFECT TRANSISTOR AND METHOD OF FABRICATING SAME
摘要 <p>A self-aligned carbon-nanotube field effect transistor semiconductor device comprises a carbon-nanotube [104] deposited on a substrate [102], a source and a drain [106-107] formed at a first end and a second end of the carbon-nanotube [104], respectively, and a gate [112] formed substantially over a portion of the carbon-nanotube [104], separated from 10 the carbon-nanotube by a dielectric film [111].</p>
申请公布号 WO2003081687(P1) 申请公布日期 2003.10.02
申请号 US2003007269 申请日期 2003.02.19
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