发明名称 Tunnelstromsensor
摘要 The dynamic quantity sensor includes an electrically insulating substance layer and at least one pair of electrodes contacting the electrically insulating substance layer, wherein a plurality of conductive particles are dispersed in the electrically insulating substance layer so that a tunnel current flows when a voltage is applied between the at least one pair of electrodes, and a dynamic quantity relating to a distance between the conductive particles is detected based on the tunnel current.
申请公布号 DE69529446(T2) 申请公布日期 2003.10.02
申请号 DE1995629446T 申请日期 1995.10.04
申请人 MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. 发明人 TOHDA, TAKAO;MANABE, YOSHIO;KADO, HIROYUKI;YOSHIDA, MASARU;TANAHASHI, ICHIRO
分类号 G01B7/16;G01C19/56;G01D5/18;G01K7/22;G01L1/20;G01P15/00;G01P15/08;G01P15/12;G01Q10/00;G01Q20/04;G01Q60/24;G01Q60/38;G01Q70/16 主分类号 G01B7/16
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