发明名称 METHOD FOR MANUFACTURING THIN PLATE
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a device and a method for manufacturing a plane thin plate capable of optimizing the shape of the thin plate obtained. <P>SOLUTION: In this device and method for manufacturing the plane thin plate, a base plate conveying mechanism 1 is provided which is movable along a horizontally moving shaft 8 in the horizontal direction 104. The horizontally moving shaft 8 is movably provided along vertically moving shafts 9. The base plate conveying mechanism 1 is further provided with a mechanism for tilting base plates 2. <P>COPYRIGHT: (C)2004,JPO</p>
申请公布号 JP2003277187(A) 申请公布日期 2003.10.02
申请号 JP20030028199 申请日期 2003.02.05
申请人 SHARP CORP 发明人 KOMA SHUJI;GOKAKU HIROZUMI;YANO KOZABURO;TANI YOSHIHEI
分类号 C01B33/02;C30B29/06;H01L31/04;(IPC1-7):C30B29/06 主分类号 C01B33/02
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