| 摘要 |
PROBLEM TO BE SOLVED: To provide a plating apparatus capable of keeping the constant concentration of the additive to the plating solution through the plating work time, and a plating solution controlling method using the plating apparatus. SOLUTION: The plating apparatus 100 calibrates the plating consumption coefficient per unit treatment number for each predetermined time, and calculates the replenishment amount to the consumption of the additive associated with the plating treatment by the 'periodically calibrated plating consumption coefficient×plating treatment number'. Therefore, the consumption of the additive agrees with the replenishment of the additive. As a result, the concentration of the additive contained in the plating solution 3 is maintained at a constant value. COPYRIGHT: (C)2004,JPO
|
