METHOD OF CONTROLLING CONCENTRATION OF SURFACE TREATMENT SOLUTION FOR COPPER OR COPPER ALLOY, AND SURFACE ROUGHENING APPARATUS USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a method of controlling the concentration of a surface treatment solution containing hydrogen peroxide, mineral acid, azoles, silver ions and halogen ions. SOLUTION: The concentration of silver ions and/or halogen ions in a surface treatment solution containing hydrogen peroxide, mineral acid, azoles, silver ions and halogen ions is periodically or continuously measured, and, when the concentration becomes out of the previously set control limit, they are replenished from a chemical replenishment tank. COPYRIGHT: (C)2004,JPO