| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a fan filter unit both reducing air flow resistance and leveling wind speed distribution, and also to downsize a fan filter unit. <P>SOLUTION: In the fan filter unit 1 having: a chamber 2; a filter 4, provided on a lower face of the chamber 2, for purifying air; and a fan 3 provided on an upper part of the chamber 2, the discharge port 7 of the fan 3 is directed to a side wall of the chamber 2. Two fans 3 are provided in the chamber 2 with both discharge ports 7 of the two fans arranged back to back. The filter 11 is laid all over the ceiling of the clean room 10 and a plurality of the fan units 12 are provided on the filter 11. <P>COPYRIGHT: (C)2004,JPO |
