METHOD OF MICROFABRICATING CRYSTAL TiO2 AND MICROFABRICATED CRYSTAL TiO2

摘要

A method of microfabricating crystal TiO2 wherein deep patterns can be formed and wherein sharp and accurate fabrication can be effected, and microfabricated crystal TiO2. A substrate of rutile crystal TiO2 with a mask (3) of desired pattern formed over an upper surface thereof is irradiated with accelerated ion. Parts (2a) irradiated with ion are leached by hydrofluoric acid. Thus, an etching reflecting the pattern of the mask (3) is carried out. Further, a microstructure wherein rutile crystal TiO2 and anatase crystal TiO2 are mixed can be formed by effecting a heat treatment of parts (2a) irradiated with ion at 900 ° C or below so as to convert the same to anatase crystal TiO2.