发明名称 |
Mask data generating apparatus, a computer implemented method for generating mask data and a computer program for controlling the mask data generating apparatus |
摘要 |
A mask data generating apparatus comprising: a division module configured to extract a line segment and dividing the extracted line segment into a suitable length; a correction value calculation module configured to calculate correction value calculating points from each divided edge; a first calculated center point calculation module configured to set first calculated center points and a shape of a pattern; a first rectangular region preparation module configured to prepare first simulation regions and a plurality of first rectangular regions which overlap with each other; a second calculated center point calculation module configured to acquire second rectangular regions, and calculating second calculated center points based on the second rectangular regions; a second simulation region preparation module configured to acquire second simulation regions; a process simulation execution module configured to calculate a correction value; and a correction pattern preparation module configured to prepare the correction pattern. |
申请公布号 |
US2003188288(A1) |
申请公布日期 |
2003.10.02 |
申请号 |
US20030385624 |
申请日期 |
2003.03.12 |
申请人 |
KABUSHIKI KAISHA TOSHIBA |
发明人 |
KOBAYASHI SACHIKO;KOTANI TOSHIYA;TANAKA SATOSHI;WATANABE SUSUMU |
分类号 |
G03F1/08;G03F1/14;G03F1/36;G03F1/68;G03F1/70;H01L21/027;H01L21/82;(IPC1-7):G06F17/50 |
主分类号 |
G03F1/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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