| 发明名称 |
METHOD AND DEVICE FOR ALIGNING A CHARGED PARTICLE BEAM COLUMN |
| 摘要 |
The invention provides a method for automatically aligning a beam of charged particles with an aperture. Thereby, a defocusing is introduced and a signal calculated based on an image shift is applied to a deflection unit. Further, a method for correction of astigmatism is provided. Thereby, the sharpness is evaluated for a set of frames generated whilst varying the signals to a stigmator. |
| 申请公布号 |
WO03032351(A3) |
申请公布日期 |
2003.10.02 |
| 申请号 |
WO2002IB05792 |
申请日期 |
2002.10.04 |
| 申请人 |
APPLIED MATERIALS ISREAL LIMITED;PEARL, ASHER |
发明人 |
PEARL, ASHER |
| 分类号 |
G21K5/04;G01T1/29;G03F7/20;H01J;H01J37/04;H01J37/153;H01J37/21;H01J37/22;H01J37/26;H01J37/28;H01J37/305;H01L21/027 |
主分类号 |
G21K5/04 |
| 代理机构 |
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| 主权项 |
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