CONTROL DEVICE FOR VACUUM PUMP AND VACUUM DEVICE

摘要

PROBLEM TO BE SOLVED: To suppress power consumption in a vacuum pump by changing the number of revolutions of the vacuum pump according to the operation state of the vacuum device. SOLUTION: A condition setting part 4 sets up the relation between the operation state of vacuum device 10 and the rotational speed of the vacuum pump 2 which exhausts the vacuum device 10. This relation is set as the suitable value so that the rotational speed of the vacuum pump 10 may not become the excessive rotational speed. A control part 6 inputs external signals such as S1 to Sn corresponding to the operation state of the vacuum device 10, reads the rotational speed of the vacuum pump 2 corresponding to the external signal from the condition setting part 4 and outputs it. An inverter 8 controls the rotational speed of the vacuum pump based on the output of the control part 6. COPYRIGHT: (C)2004,JPO