发明名称 Nano-structure and method of manufacturing nano-structure
摘要 A structure having projections is provided. The structure having projections comprises a first projection formed on a first layer containing a first material, and a plurality of second projections formed around the first projection and containing a material capable of being subjected to anodic oxidation.
申请公布号 US2003186514(A1) 申请公布日期 2003.10.02
申请号 US20030391632 申请日期 2003.03.20
申请人 CANON KABUSHIKI KAISHA 发明人 IMADA AYA;DEN TOHRU
分类号 B81B1/00;H01L21/326;(IPC1-7):H01L21/326;H01L21/479 主分类号 B81B1/00
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