发明名称 |
Thermosensitive flow rate detecting element and method for the manufacture thereof |
摘要 |
A dummy pattern is constituted by frame-shaped first patterns formed on a flat substrate so as to surround a resistance heater and a fluid temperature resistance thermometer, and frame-shaped second patterns formed on inner perimeter sides of the first patterns, edge portions of first and second diaphragm portions being positioned between the first patterns and the second patterns. |
申请公布号 |
US2003185270(A1) |
申请公布日期 |
2003.10.02 |
申请号 |
US20030378919 |
申请日期 |
2003.03.05 |
申请人 |
MITSUBISHI DENKI KABUSHIKI KAISHA |
发明人 |
KAWAI MASAHIRO;TAGUCHI MOTOHISA |
分类号 |
G01F1/68;F02D35/00;G01F1/684;G01F1/692;H01L37/00;(IPC1-7):G01K7/00 |
主分类号 |
G01F1/68 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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