| 摘要 |
PROBLEM TO BE SOLVED: To provide a multi-element compound manufacturing apparatus capable of increasing the speed of material development, and continuously changing the composition ratio. SOLUTION: In this multi-element compound manufacturing apparatus, a material evaporating mechanism (1), a mask moving mechanism (2) and a substrate rotating mechanism (4) with a substrate heater (3) are disposed in this order from a lower side. The material evaporating mechanism (1) evaporates materials (6) by irradiating each one kind of the material (6) out of a plurality of kinds of materials (6) rotating in the horizontal direction with the laser beam (7). The mask moving mechanism (2) has a plate-like movable mask (9) with an aperture (10) formed in a middle part of the horizontal surface disposed horizontally on a middle part between the substrate rotating mechanism (4) and the material evaporating mechanism (1), and reciprocates the movable mask (9) horizontally in the one-dimensional direction. The substrate rotating mechanism (4) has the substrate heater (3), and rotates a horizontally disposed disk-like substrate (8) in the horizontal direction while heating the substrate. COPYRIGHT: (C)2004,JPO
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