发明名称 |
Method and apparatus for a low cost, high speed, and compact nanometer precision motion stage using friction drive and flexure hinge |
摘要 |
A friction drive including a drive shaft that is in rotational motion and in frictional contact with a follower at a contact area. The drive shaft transfers a thrust at the contact area. The follower receives the thrust and provides motion in response to the thrust. A flexure hinge couples the drive shaft to the follower with a constant force while restraining movement of the contact area in the direction of the thrust.
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申请公布号 |
US2003185592(A1) |
申请公布日期 |
2003.10.02 |
申请号 |
US20020112341 |
申请日期 |
2002.03.29 |
申请人 |
OHARA TETSUO |
发明人 |
OHARA TETSUO |
分类号 |
G02B21/26;G02B7/02;H01L41/09;H02N2/00;(IPC1-7):G03G15/00 |
主分类号 |
G02B21/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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