发明名称 Integrated sensor packages and methods of making the same
摘要 Elements of a sensor system are encapsulated into a single package. The sensor elements are covered with a flexible gel coat and then inserted into a molding tool cavity. Each element may be individually coated with a gel blob, or all elements may by coated with a single gel blob. One or more retractable pins are incorporated into the molding tool and in their normal position are each in contact with the gel. A molding compound is injected into the cavity so as to encapsulate the device and gel coat. When the pins are extracted and the device ejected from the molding cavity, one or more passageways in the molding are left defined by the pins. The passageways expose the flexible gel covering the device elements to the atmosphere. For pressure sensitive elements, the gel, being flexible, transfers the local air pressure to the pressure sensitive element. For optical elements, the exposed gel is preferably removed to allow for the passage of radiation to and from the device elements. Alternatively, or in addition, an optically transmitting gel is used so as to allow for the passage of radiation at specific wavelengths.
申请公布号 US2003186482(A1) 申请公布日期 2003.10.02
申请号 US20010956469 申请日期 2001.09.18
申请人 MELEXIS NV MICROELECTRONIC INT 发明人 SCHUURMANS JOHAN;BETTS WILLIAM R;DIELS ROGER;HILL ADRIAN
分类号 G01L9/00;H01L21/44;H01L21/48;H01L21/50;H01L23/31;H01L29/82;H01L43/00;(IPC1-7):H01L21/44 主分类号 G01L9/00
代理机构 代理人
主权项
地址