| 摘要 |
A bonding apparatus including an ultrasonic horn having a capillary, a horn holder holding the ultrasonic horn, a swing arm rotatably supporting the horn holder on horn holder supporting shafts, and auxiliary arms which are rotatably supported by auxiliary arm supporting shafts and rotatably supported by connecting shafts on the horn holder. The horn holder supporting shafts are disposed above a hypothetical center of an imaginary horizontal line extending from the tip end of the capillary, the auxiliary arm supporting shafts are disposed in the back of the horn holder supporting shafts and at the same height as the horn holder supporting shafts, and the connecting shafts are disposed at an intersection of an extension of an imaginary line connecting the tip end of the capillary and the horn holder supporting shafts and an extension of an imaginary line connecting the hypothetical center and the auxiliary arm supporting shafts. |
