SYNTHETIC QUARTZ GLASS MEMBER AND PROCESS FOR PRODUCING THE SAME

摘要

A process for producing a quartz glass member, wherein a sample from a quartz glass base material is exposed to F2 laser under given conditions and whether or not the peak intensity of H2 Raman scattering radiation is decreased by 80% or more from the peak intensity of H2 Raman scattering radiation with respect to a sample not exposed to F2 laser is judged. When the decrease of the peak intensity of H2 Raman scattering radiation is less than 80%, the laser resistance of the quartz glass base material is judged as being satisfactory, and a synthetic quartz glass member is worked from the base material. The compaction of the sample is also measured.