发明名称 Multi-level patterning
摘要 <p>A method of producing an element of an electronic device, including the steps of providing a substrate; depositing on said substrate a layer of a switchable material, which changes its physical or chemical properties upon irradiation with light or heating causing a change of its surface energy properties; irradiatively inducing at selected regions of a layer of switchable material a change in physical or chemical properties that alters the surface energy of said selected regions and thereby forming a surface energy pattern on its surface; and without removing said layer of switchable material in either irradiated selected regions or non-irradiated regions from the substrate depositing over the surface energy pattern produced in step a material for forming an element of the electronic device such that the surface energy pattern controls the deposition of said material.</p>
申请公布号 GB0320491(D0) 申请公布日期 2003.10.01
申请号 GB20030020491 申请日期 2003.09.02
申请人 PLASTIC LOGIC LTD 发明人
分类号 B22F3/00;H01B1/22;H01L21/311;H01L21/60;H01L21/768;H01L51/40;H01L51/52 主分类号 B22F3/00
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