| 摘要 |
PROBLEM TO BE SOLVED: To enable development without using harmful chemicals by incorporat ing a specified compd., an optical acid generating agent which generates an acid when irradiated with light and a solvent. SOLUTION: This compsn. contains a homo- or co-polymer contg. repeating units represented by the formula, an optical acid generating agent which generates an acid when irradiated with light and a solvent dissolving a polymer and the optical acid generating agent. In the formula, one of X<1> -X<4> is -OR<1> , -COOR<1> or -R<2> -OR<1> (R<1> is hydrocarbon released by an acid and R<2> is divalent hydrocarbon or a group obtd. by substituting an atom such as halogen, Si or Ti or an atomic group consisting of such atoms for part of a hydrocarbon group), another is -COR<3> (R<3> is hydrocarbon or a group obtd. by substituting an atom such as halogen, Si or Ti or an atomic group consisting of such atoms for part of a hydrocarbon group) and the remaining two are H. |
