Film thickness measuring method and measuring apparatus for organic thin film for use in organic electroluminescence device

摘要

A method for measuring a relative thickness distribution of an organic thin film (161) for use in an organic electroluminescence device (16) comprises the steps of irradiating a predetermined region of the organic thin film (161) with a light including an ultraviolet light (13), measuring the intensity of a fluorescence (14) produced by the organic thin film (161) in response to the light irradiation (13), and obtaining a film thickness of the predetermined region from the intensity of the fluorescence (14). Further, an apparatus for measuring a thickness distribution for use in an organic electroluminescence device (16) has means (11) for irradiating a predetermined region of the organic thin film (161) with a light including an ultraviolet light (13), means (12) for measuring the intensity of a fluorescence produced by the organic thin film (121), and means (20) for obtaining the film thickness of the predetermined region from the intensity of the fluorescence (14). <IMAGE>