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发明名称
Lithographic manufacturing process comprising a method of measuring overlay
摘要
申请公布号
EP1348150(A1)
申请公布日期
2003.10.01
申请号
EP20010272188
申请日期
2001.12.12
申请人
KONINKLIJKE PHILIPS ELECTRONICS N.V.
发明人
MONSHOUWER, RENE;NEIJZEN, JACOBUS, H., M.;VAN DER WERF, JAN, E.
分类号
G01B11/00;G03F7/20;G03F7/22;G03F9/00;H01L21/027;(IPC1-7):G03F9/00
主分类号
G01B11/00
代理机构
代理人
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