| 摘要 |
PURPOSE: An orientation film forming line is provided to remove a robot between first and secondary rinsing steps for simplifying the rinsing step, and reduce the rinsing time by carrying out the first and secondary rinsing steps continuously by connecting the rinsing lines with conveyer belts. CONSTITUTION: An orientation film forming line includes a loader part, a rinsing part, a robot part, an orientation film printing part, a drying/plasticizing part, and an unloader part. A lower substrate formed with thin film transistors and pixels or an upper substrate formed with a light shield film and color filter layers is loaded to the loader part and moved to the rinsing part to remove impurities on the substrate. The substrate is transferred to the orientation film printing part to be printed with a polyimide or polyamide orientation solution. The solution is dried to be cured through the drying/plasticizing part, and the substrate formed with an orientation film is unloaded in the unloading part. The rinsing part includes a WET part for primary rinsing, and an IR part, an Examier part, and a CPO part for secondary rinsing, which are connected in series by conveyer belts to carry out the first and secondary rinsing continuously. |
